Special Filter

Hybrid Capsule Filter
DFPC is capsule type filter made from polypropylene.

Materials of Composition	Hardware / Polypropylene Media / Any kinds of materials we supply
Filtration Precision	Depending on material of media
Connection and Dimensions	Outside diameter: 72mm Length: 139mm R1/2 (PT1/2), R1/4 (PT1/4), F (Ferrule), SW (Swagelok type)
Maximum Differential Pressure	0.39MPa
Maximum Operating Temperature	60°C
Applicable Fluids	Pure water, Photoresist, etc
Model Code

All Teflon Membrane Filter
DFZC is capsule type filter made from Teflon. It is suitable for semiconductor process lines.

Materials of Composition	Hardware / PFA Media / PTFE Support / PTFE Center Core / PFA
Filtration Precision (Absolute microns)	0.03, 0.05, 0.1, 0.2, 0.45, 1
Connection and Dimensions	Pillar fitting: Super type, 300 series, Flaretech, Buttweld Length: 4, 10, 20, 30 (inch)
Maximum Differential Pressure & Operating Temperature	0.55MPa / 24°C 0.1MPa / 180°C
Applicable Fluids	High temperature semiconducting chemicals, Chemicals, Photoresist, Concentrated acid, Ozone water, etc
Model Code